Microfocus and Nanofocus Systems
These electron sources generate a very small spot in the µm and nm range. They are primarily used for imaging (SEM) and Scanning Auger Microscopy (SAM).
| Min. Spot Size | Max. Energy | Model Description |
| <85 nm | 15 keV | » EF-15005 |
| 150 nm | 12 keV | » EF-1201 |
| 250 nm | 12 keV | » EF-1202 |
| 400 nm | 10 keV | » EF-1005 |
| 2 µm | 8 keV | » EM-802 |
| 3 µm | 5 keV | » EM-503 |
| 6 µm | 5 keV | » EM-506 |
These electron sources are available as part of an UHV-SEM package. You may also choose matching
- AES and XPS energy spectrometers single (ESA) and double (DESA) pass models
- Secondary electron detectors for imaging
- Scanning and imaging package (SEM package)
In addition for Nanofocus