This electron gun column is designed to generate a very small spot in the nm range. It is also available as part of a complete scanning electron imaging package (SEM-package).

Key features

  • Beam size (min.) <85 nm at max energy and 12 mm working distance
  • Energy range 200 eV – 15 keV
  • Beam current (max.) 1 μA

Characteristics

Not all parameters can be reached simultaneously. Above specifications may change without notice.
Pictures / diagrams for reference only.