General purpose electron source in a medium energy range up to 3 keV with a focused beam of adjustable size and deflection / scanning capability.

Key features

  • Energy range 20 eV – 3 keV
  • Beam current (max.) 20 μA
  • Beam size (min.) 90 µm at max energy and 21 mm working distance

Characteristics

Not all parameters can be reached simultaneously. Above specifications may change without notice.
Pictures / diagrams for reference only.