Ion sources manufactured by STAIB Instruments are compact, light weight, high performance instruments.
Key features
- Type: UHV compatible douplasmatron
- Energy range: 500 eV to 5 keV
- Minimum beam diameter: 5 to 10 μm (dep. on energy and distance)
- Working pressure (chamber): 6 x 10-8 – 1 x 10-5 mbar
- Working pressure (ion gun): 1 x 10-4 – 1 x 10-3 mbar
- Working distance: 10 – 125 mm
- Deflection in X, Y
- Insertion length: 165 mm, others on request
- Diameter with shielding: 60 mm
- Mounting flange: 4.5″ O.D./ CF 63
- Bakeout temperature 200° C
- Filament: cold cathode
- Differential pumping (2x)
- Emission current control
- Gases: Argon, Xenon, O2, N2, H2
Options
- Scan generator
- Gas inlet valve
- Regulated gas inlet valve
- Imaging
